Projects
About this project
4,852 NSF of laboratory space in building for the departments of Engineering and Nanofabrication. Facility includes E-Beam Lithography, Wet Processing, Thermal Processing and Vacuum Deposition / Etch area. 10,000 NSF Clean Room and 4,000 NSF of Clean Room support space function as a Central Clean Room facility for the campus serving programs such as Physics and Chemistry in addition to Engineering. Facility designed to be adaptable to new developing technology like Micro-Electrical Mechanical Systems (MEMS) or Biological structures for biological neural networks. Support spaces include Packaging / Dicing, Testing, Toxic / Flammable / Chemical Storage, and Electronic Shop.
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